Influence of adhesion intermediate layers on the stability of nanodiamond composite films deposited on Si substrates by coaxial arc plasma

Ali M. Ali, Mohamed Egiza, Koki Murasawa, Hiroaki Sugita, Tanja Deckert-Gaudig, Volker Deckert, Tsuyoshi Yoshitake

Research output: Contribution to journalArticle

Abstract

Nanodiamond composite (NDC) films deposited on silicon substrates by coaxial arc-plasma deposition at room temperature are easily peeled off with increasing film thickness. This research adapted additional NDC intermediate layers deposited at high temperatures, to induce atomic interdiffusion towards the Si substrates, which effectively enhances the adhesion of the intermediate layers with the substrates. In addition, the intermediate layers exhibit low residual stresses and hardnesses, and they can relieve large stresses of the top hard-layers. Consequently, the deposition of 1.5 μm thickness and 55 GPa hardness of NDC films on silicon substrates is possible, which opens up their applications in micro-electro-mechanical-systems and biosensors.

Original languageEnglish
Article number065506
JournalApplied Physics Express
Volume13
Issue number6
DOIs
Publication statusPublished - Jun 1 2020

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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