Influence of ambient gas on diamond-like carbon films prepared by KrF pulsed laser deposition

Kenji Ebihara, Toshiyuki Nakamiya, Tamiko Ohshima, Tomoaki Ikegami, Shin Ichi Aoqui

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

We have studied the diamond-like carbon (DLC) and carbon nitride (CN) thin films deposited by KrF excimer laser (248 nm) ablation under various ambient gas conditions. DLC thin films were deposited on quartz and Si(100) substrates in pure hydrogen and helium gas at laser fluence of 2-10 J/cm2. Optical absorption measurements show that the DLC films prepared in a H2 atmosphere of 800 mTorr with 8 J/cm2 have an optical band gap of 2.0 eV. The tetrahedral amorphous carbon (ta-C) films deposited in helium gas have an optical band gap of approximately 1.0 eV. Incorporation of nitrogen atoms in the DLC films showed marked change in the optical properties when the N2 mixture ratio in hydrogen exceeded 50%. The composite layered structures consisting of DLC and CN were formed to investigate the optical property in stacked CN films. Laser-induced fluorescent technique was used to study the dynamics of C2 molecules produced by pulsed laser deposition at various ambient gas conditions.

Original languageEnglish
Pages (from-to)900-904
Number of pages5
JournalDiamond and Related Materials
Volume10
Issue number3-7
DOIs
Publication statusPublished - Mar 2001
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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