Influences of repetition rate of arc discharges on hardness and modulus of ultrananocrystalline diamond films prepared by coaxial arc plasma deposition

Tomohiro Yoshida, Kenji Hanada, Hiroki Gima, Ryota Ohtani, Kazushi Sumitani, Hiroyuki Setoyama, Aki Tominaga, Tsuyoshi Yoshitake

    Research output: Contribution to journalArticle

    Abstract

    Ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films were prepared at different repetition rates of arc discharge by coaxial arc plasma deposition. With increasing repetition rate from 5 to 20 Hz, the hardness decreased from 23 to 11 GPa. TheUNCD grain size and sp3/(sp2 + sp3) estimated from powder X-ray diffraction (XRD) and X-ray photoemission spectra decreased from 2.6 to 1.8 nmand from 71 to 62%, respectively. Near-edge X-ray absorption fine-structure and Fourier transform infrared spectroscopic measurements revealed enlarged σ∗C-Hand sp2-CH peaks, respectively. The formation of sp2-CH bonds at grain boundaries owing to the reduced grain size results in degraded hardness.

    Original languageEnglish
    Article number015021
    JournalMaterials Research Express
    Volume2
    Issue number1
    DOIs
    Publication statusPublished - Jan 2015

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Biomaterials
    • Surfaces, Coatings and Films
    • Polymers and Plastics
    • Metals and Alloys

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