Influences of repetition rate of arc discharges on hardness and modulus of ultrananocrystalline diamond films prepared by coaxial arc plasma deposition

Tomohiro Yoshida, Kenji Hanada, Hiroki Gima, Ryota Ohtani, Kazushi Sumitani, Hiroyuki Setoyama, Aki Tominaga, Tsuyoshi Yoshitake

    Research output: Contribution to journalArticle

    Abstract

    Ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films were prepared at different repetition rates of arc discharge by coaxial arc plasma deposition. With increasing repetition rate from 5 to 20 Hz, the hardness decreased from 23 to 11 GPa. TheUNCD grain size and sp 3 /(sp 2 + sp 3 ) estimated from powder X-ray diffraction (XRD) and X-ray photoemission spectra decreased from 2.6 to 1.8 nmand from 71 to 62%, respectively. Near-edge X-ray absorption fine-structure and Fourier transform infrared spectroscopic measurements revealed enlarged σ∗C-Hand sp 2 -CH peaks, respectively. The formation of sp2-CH bonds at grain boundaries owing to the reduced grain size results in degraded hardness.

    Original languageEnglish
    Article number015021
    JournalMaterials Research Express
    Volume2
    Issue number1
    DOIs
    Publication statusPublished - Jan 1 2015

    Fingerprint

    Plasma deposition
    Diamond films
    Hardness
    Diamond
    Amorphous carbon
    X ray absorption
    Photoemission
    Composite films
    X ray powder diffraction
    Diamonds
    Fourier transforms
    Grain boundaries
    Infrared radiation
    X rays

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Biomaterials
    • Surfaces, Coatings and Films
    • Polymers and Plastics
    • Metals and Alloys

    Cite this

    Influences of repetition rate of arc discharges on hardness and modulus of ultrananocrystalline diamond films prepared by coaxial arc plasma deposition. / Yoshida, Tomohiro; Hanada, Kenji; Gima, Hiroki; Ohtani, Ryota; Sumitani, Kazushi; Setoyama, Hiroyuki; Tominaga, Aki; Yoshitake, Tsuyoshi.

    In: Materials Research Express, Vol. 2, No. 1, 015021, 01.01.2015.

    Research output: Contribution to journalArticle

    Yoshida, Tomohiro ; Hanada, Kenji ; Gima, Hiroki ; Ohtani, Ryota ; Sumitani, Kazushi ; Setoyama, Hiroyuki ; Tominaga, Aki ; Yoshitake, Tsuyoshi. / Influences of repetition rate of arc discharges on hardness and modulus of ultrananocrystalline diamond films prepared by coaxial arc plasma deposition. In: Materials Research Express. 2015 ; Vol. 2, No. 1.
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    AU - Hanada, Kenji

    AU - Gima, Hiroki

    AU - Ohtani, Ryota

    AU - Sumitani, Kazushi

    AU - Setoyama, Hiroyuki

    AU - Tominaga, Aki

    AU - Yoshitake, Tsuyoshi

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