Influences of repetition rate of arc discharges on hardness and modulus of ultrananocrystalline diamond films prepared by coaxial arc plasma deposition

Tomohiro Yoshida, Kenji Hanada, Hiroki Gima, Ryota Ohtani, Kazushi Sumitani, Hiroyuki Setoyama, Aki Tominaga, Tsuyoshi Yoshitake

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