Integrated blood flowmeter using micromachining technology

Yukie Omori, Renshi Sawada, Susumu Sakano

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.

    Original languageEnglish
    Title of host publication13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
    PublisherIMEKO-International Measurement Federation Secretariat
    Pages447-452
    Number of pages6
    ISBN (Electronic)9781634391849
    Publication statusPublished - Jan 1 2014
    Event13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing - Athens, Greece
    Duration: Sep 29 2004Oct 1 2004

    Publication series

    Name13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing

    Other

    Other13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
    Country/TerritoryGreece
    CityAthens
    Period9/29/0410/1/04

    All Science Journal Classification (ASJC) codes

    • Civil and Structural Engineering
    • Industrial and Manufacturing Engineering
    • Instrumentation

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