Integrated blood flowmeter using micromachining technology

Yukie Omori, Renshi Sawada, Susumu Sakano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.

Original languageEnglish
Title of host publication13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
PublisherIMEKO-International Measurement Federation Secretariat
Pages447-452
Number of pages6
ISBN (Electronic)9781634391849
Publication statusPublished - Jan 1 2014
Event13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing - Athens, Greece
Duration: Sep 29 2004Oct 1 2004

Publication series

Name13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing

Other

Other13th IMEKO TC4 Symposium on Measurements for Research and Industrial Applications 2004, Held Together with the 9th Workshop on ADC Modeling and Testing
CountryGreece
CityAthens
Period9/29/0410/1/04

All Science Journal Classification (ASJC) codes

  • Civil and Structural Engineering
  • Industrial and Manufacturing Engineering
  • Instrumentation

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