Integrated laser doppler blood flowmeter designed to enable wafer-level packaging

Yoshinori Kimura, Masaki Goma, Atsushi Onoe, Eiji Higurashi, Renshi Sawada

    Research output: Contribution to journalArticlepeer-review

    24 Citations (Scopus)


    The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.

    Original languageEnglish
    Article number5422744
    Pages (from-to)2026-2033
    Number of pages8
    JournalIEEE Transactions on Biomedical Engineering
    Issue number8
    Publication statusPublished - Aug 2010

    All Science Journal Classification (ASJC) codes

    • Biomedical Engineering


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