Integrated laser doppler blood flowmeter designed to enable wafer-level packaging

Yoshinori Kimura, Masaki Goma, Atsushi Onoe, Eiji Higurashi, Renshi Sawada

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.

Original languageEnglish
Article number5422744
Pages (from-to)2026-2033
Number of pages8
JournalIEEE Transactions on Biomedical Engineering
Volume57
Issue number8
DOIs
Publication statusPublished - Aug 1 2010

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Flowmeters
Product Packaging
Packaging
Lasers
Blood
Silicon
Sensors
Tissue
Microtechnology
Semiconductor Lasers
Micromachining
Semiconductor lasers
Electric power utilization

All Science Journal Classification (ASJC) codes

  • Biomedical Engineering

Cite this

Integrated laser doppler blood flowmeter designed to enable wafer-level packaging. / Kimura, Yoshinori; Goma, Masaki; Onoe, Atsushi; Higurashi, Eiji; Sawada, Renshi.

In: IEEE Transactions on Biomedical Engineering, Vol. 57, No. 8, 5422744, 01.08.2010, p. 2026-2033.

Research output: Contribution to journalArticle

Kimura, Yoshinori ; Goma, Masaki ; Onoe, Atsushi ; Higurashi, Eiji ; Sawada, Renshi. / Integrated laser doppler blood flowmeter designed to enable wafer-level packaging. In: IEEE Transactions on Biomedical Engineering. 2010 ; Vol. 57, No. 8. pp. 2026-2033.
@article{3238f5a7c1a646bdaf599276e917f69b,
title = "Integrated laser doppler blood flowmeter designed to enable wafer-level packaging",
abstract = "The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.",
author = "Yoshinori Kimura and Masaki Goma and Atsushi Onoe and Eiji Higurashi and Renshi Sawada",
year = "2010",
month = "8",
day = "1",
doi = "10.1109/TBME.2010.2043842",
language = "English",
volume = "57",
pages = "2026--2033",
journal = "IEEE Transactions on Biomedical Engineering",
issn = "0018-9294",
publisher = "IEEE Computer Society",
number = "8",

}

TY - JOUR

T1 - Integrated laser doppler blood flowmeter designed to enable wafer-level packaging

AU - Kimura, Yoshinori

AU - Goma, Masaki

AU - Onoe, Atsushi

AU - Higurashi, Eiji

AU - Sawada, Renshi

PY - 2010/8/1

Y1 - 2010/8/1

N2 - The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.

AB - The authors propose a new sensor structure for an integrated laser Doppler blood flowmeter that consists of two silicon cavities with a PD and laser diode inside each cavity. A silicon lid formed with a converging microlens completes the package. This structure, which was achieved using micromachining techniques, features reduced optical power loss in the sensor, resulting in its small size and significantly low power consumption. Measurements using a model tissue blood flow system confirmed that the new sensor had high linearity and a wide dynamic range for measuring tissue blood flow.

UR - http://www.scopus.com/inward/record.url?scp=77954637454&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77954637454&partnerID=8YFLogxK

U2 - 10.1109/TBME.2010.2043842

DO - 10.1109/TBME.2010.2043842

M3 - Article

C2 - 20199932

AN - SCOPUS:77954637454

VL - 57

SP - 2026

EP - 2033

JO - IEEE Transactions on Biomedical Engineering

JF - IEEE Transactions on Biomedical Engineering

SN - 0018-9294

IS - 8

M1 - 5422744

ER -