Abstract
An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.
| Original language | English |
|---|---|
| Pages (from-to) | 47-48 |
| Number of pages | 2 |
| Journal | Unknown Journal |
| Publication status | Published - 1998 |
| Externally published | Yes |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics
Cite this
Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage. / Sawada, Renshi; Higurashi, Eiji; Itoh, Takahiro; Tsubamoto, Mieko.
In: Unknown Journal, 1998, p. 47-48.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage
AU - Sawada, Renshi
AU - Higurashi, Eiji
AU - Itoh, Takahiro
AU - Tsubamoto, Mieko
PY - 1998
Y1 - 1998
N2 - An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.
AB - An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.
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UR - http://www.scopus.com/inward/citedby.url?scp=0031625625&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0031625625
SP - 47
EP - 48
JO - Quaternary International
JF - Quaternary International
SN - 1040-6182
ER -