Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

Renshi Sawada; Eiji Higurashi; Takahiro Itoh; Mieko Tsubamoto

Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

Renshi Sawada, Eiji Higurashi, Takahiro Itoh, Mieko Tsubamoto

Research output: Contribution to journal › Article › peer-review

Abstract

An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.

Original language	English
Pages (from-to)	47-48
Number of pages	2
Journal	Unknown Journal
Publication status	Published - 1998
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics

Cite this

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title = "Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage",

abstract = "An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.",

author = "Renshi Sawada and Eiji Higurashi and Takahiro Itoh and Mieko Tsubamoto",

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journal = "Quaternary International",

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AU - Sawada, Renshi

AU - Higurashi, Eiji

AU - Itoh, Takahiro

AU - Tsubamoto, Mieko

PY - 1998

Y1 - 1998

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Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

Abstract

All Science Journal Classification (ASJC) codes

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