An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.
|Number of pages||2|
|Publication status||Published - 1998|
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics