Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage

Renshi Sawada, Eiji Higurashi, Takahiro Itoh, Mieko Tsubamoto

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

An integrated optical micro-displacement sensor was developed using beam diverging from a laser diode. This can measure the distance traveled relative to an external mirror. The measurement resolution is as low as of order of 0.01 μm. It is 0.5 by 0.5 mm. Three of these sensors are incorporated in to the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions.

Original languageEnglish
Pages (from-to)47-48
Number of pages2
JournalUnknown Journal
Publication statusPublished - 1998
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

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