Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror

Renshi Sawada, E. Higurashi, S. Sanada, D. Chino, I. Ishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mm× 1.5 mm× 1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5°. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages52-53
Number of pages2
Publication statusPublished - 2006
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: Aug 21 2006Aug 24 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period8/21/068/24/06

Fingerprint

Mirrors
rangefinding
Surface emitting lasers
mirrors
surface emitting lasers
sensors
Sensors
cavities
Photodiodes
photodiodes
Microscopes
microscopes
Scanning
scanning

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Sawada, R., Higurashi, E., Sanada, S., Chino, D., & Ishikawa, I. (2006). Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 52-53). [1708260]

Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. / Sawada, Renshi; Higurashi, E.; Sanada, S.; Chino, D.; Ishikawa, I.

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. p. 52-53 1708260.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sawada, R, Higurashi, E, Sanada, S, Chino, D & Ishikawa, I 2006, Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708260, pp. 52-53, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 8/21/06.
Sawada R, Higurashi E, Sanada S, Chino D, Ishikawa I. Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. p. 52-53. 1708260
Sawada, Renshi ; Higurashi, E. ; Sanada, S. ; Chino, D. ; Ishikawa, I. / Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. pp. 52-53
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