Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror

R. Sawada, E. Higurashi, S. Sanada, D. Chino, I. Ishikawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mm× 1.5 mm× 1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5°. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

    Original languageEnglish
    Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
    PublisherIEEE Computer Society
    Pages52-53
    Number of pages2
    ISBN (Print)078039562X, 9780780395626
    DOIs
    Publication statusPublished - 2006
    EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
    Duration: Aug 21 2006Aug 24 2006

    Publication series

    NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

    Other

    OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
    Country/TerritoryUnited States
    CityBig Sky, MT
    Period8/21/068/24/06

    All Science Journal Classification (ASJC) codes

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics

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