Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror

R. Sawada, E. Higurashi, S. Sanada, D. Chino, I. Ishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL of 1.5 mm× 1.5 mm× 1 mm that is surrounded by three photodiodes. It can measure the linear distance traveled or the tilting angle for an external mirror. The resolution is 10 nm for a measurement range of 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5°. The sensors can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
PublisherIEEE Computer Society
Pages52-53
Number of pages2
ISBN (Print)078039562X, 9780780395626
DOIs
Publication statusPublished - 2006
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: Aug 21 2006Aug 24 2006

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period8/21/068/24/06

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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  • Cite this

    Sawada, R., Higurashi, E., Sanada, S., Chino, D., & Ishikawa, I. (2006). Integrated micro-displacement sensor that can measure tilting or linear motion for an external mirror. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 52-53). [1708260] (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). IEEE Computer Society. https://doi.org/10.1109/omems.2006.1708260