Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Itaru Ishikawa; Renshi Sawada; Eiji Higurashi; Shingo Sanada; Daisuke Chino

doi:10.1016/j.sna.2007.03.027

Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Itaru Ishikawa, Renshi Sawada, Eiji Higurashi, Shingo Sanada, Daisuke Chino

Research output: Contribution to journal › Article › peer-review

45 Citations (Scopus)

Abstract

An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

Original language	English
Pages (from-to)	269-275
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	138
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2007.03.027
Publication status	Published - Aug 26 2007

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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abstract = "An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.",

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AU - Ishikawa, Itaru

AU - Sawada, Renshi

AU - Higurashi, Eiji

AU - Sanada, Shingo

AU - Chino, Daisuke

PY - 2007/8/26

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