TY - JOUR
T1 - Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror
AU - Ishikawa, Itaru
AU - Sawada, Renshi
AU - Higurashi, Eiji
AU - Sanada, Shingo
AU - Chino, Daisuke
N1 - Funding Information:
This study was supported in part by the New Energy and Industrial Technology Development Organization (NEDO) of Japan. The authors also wish to thank Yoshinori Kimura and Atsushi Onoe of Pioneer Ltd. and Takeshi Kobayashi of AIST for fabricating the reflective regions of the cover glasses.
PY - 2007/8/26
Y1 - 2007/8/26
N2 - An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.
AB - An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.
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U2 - 10.1016/j.sna.2007.03.027
DO - 10.1016/j.sna.2007.03.027
M3 - Article
AN - SCOPUS:34547736883
SN - 0924-4247
VL - 138
SP - 269
EP - 275
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 2
ER -