Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Itaru Ishikawa; Renshi Sawada; Eiji Higurashi; Shingo Sanada; Daisuke Chino

doi:10.1016/j.sna.2007.03.027

Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Itaru Ishikawa, Renshi Sawada, Eiji Higurashi, Shingo Sanada, Daisuke Chino

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

Original language	English
Pages (from-to)	269-275
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	138
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2007.03.027
Publication status	Published - Aug 26 2007

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Access to Document

10.1016/j.sna.2007.03.027

Cite this

@article{2ba965a70e6a45bc9d3a1113c74a1091,

title = "Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror",

abstract = "An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.",

author = "Itaru Ishikawa and Renshi Sawada and Eiji Higurashi and Shingo Sanada and Daisuke Chino",

note = "Funding Information: This study was supported in part by the New Energy and Industrial Technology Development Organization (NEDO) of Japan. The authors also wish to thank Yoshinori Kimura and Atsushi Onoe of Pioneer Ltd. and Takeshi Kobayashi of AIST for fabricating the reflective regions of the cover glasses.",

year = "2007",

month = aug,

day = "26",

doi = "10.1016/j.sna.2007.03.027",

language = "English",

volume = "138",

pages = "269--275",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

AU - Ishikawa, Itaru

AU - Sawada, Renshi

AU - Higurashi, Eiji

AU - Sanada, Shingo

AU - Chino, Daisuke

N1 - Funding Information: This study was supported in part by the New Energy and Industrial Technology Development Organization (NEDO) of Japan. The authors also wish to thank Yoshinori Kimura and Atsushi Onoe of Pioneer Ltd. and Takeshi Kobayashi of AIST for fabricating the reflective regions of the cover glasses.

PY - 2007/8/26

Y1 - 2007/8/26

N2 - An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

AB - An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

UR - http://www.scopus.com/inward/record.url?scp=34547736883&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34547736883&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2007.03.027

DO - 10.1016/j.sna.2007.03.027

M3 - Article

AN - SCOPUS:34547736883

VL - 138

SP - 269

EP - 275

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 2

ER -

Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this