Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Itaru Ishikawa, Renshi Sawada, Eiji Higurashi, Shingo Sanada, Daisuke Chino

    Research output: Contribution to journalArticlepeer-review

    45 Citations (Scopus)

    Abstract

    An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

    Original languageEnglish
    Pages (from-to)269-275
    Number of pages7
    JournalSensors and Actuators, A: Physical
    Volume138
    Issue number2
    DOIs
    Publication statusPublished - Aug 26 2007

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Instrumentation
    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Metals and Alloys
    • Electrical and Electronic Engineering

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