Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Itaru Ishikawa, Renshi Sawada, Eiji Higurashi, Shingo Sanada, Daisuke Chino

Research output: Contribution to journalArticle

43 Citations (Scopus)


An integrated optical micro-displacement sensor was developed that uses the beam diverging from a vertical cavity surface emitting laser (VCSEL). The sensor consists of a VCSEL (1.5 mm × 1.5 mm × 1.2 mm) that is surrounded by three photodiodes and can measure the linear distance traveled and the tilting angle of an external mirror. The resolution is 20 nm for a measurement range up to 0.4 mm, or less than 40 nm for a wider measurement range of 1.8 mm. The full range of the measurable tilting angle is 5 °. This sensor can be incorporated into devices with micro-mirrors, such as integrated scanning microscopes.

Original languageEnglish
Pages (from-to)269-275
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - Aug 26 2007


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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