Integrated micro-displacement sensor that uses beam divergence

Takahiro Ito, Renshi Sawada, Eiji Higurashi

    Research output: Contribution to journalArticlepeer-review

    9 Citations (Scopus)


    An integrated optical micro-displacement sensor that uses a divergent laser beam has been developed. The sensor can measure the distance to an external reflective mirror. The measurement resolution is as high as 0.01 μm. The laser diode, photodiodes and optical waveguide are monolithically integrated on a GaAs substrate. This integration eliminates the difficult optical alignment and makes the sensor extremely small. The sensor is only 0.8 × 0.75 mm2, and can therefore be directly attached at the place where the displacement is to be measured.

    Original languageEnglish
    Pages (from-to)942-947
    Number of pages6
    JournalJournal of Micromechanics and Microengineering
    Issue number6
    Publication statusPublished - Nov 1 2003

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Mechanics of Materials
    • Mechanical Engineering
    • Electrical and Electronic Engineering


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