Integrated micro-displacement sensor that uses beam divergence

Takahiro Ito; Renshi Sawada; Eiji Higurashi

doi:10.1088/0960-1317/13/6/317

Integrated micro-displacement sensor that uses beam divergence

Takahiro Ito, Renshi Sawada, Eiji Higurashi

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

An integrated optical micro-displacement sensor that uses a divergent laser beam has been developed. The sensor can measure the distance to an external reflective mirror. The measurement resolution is as high as 0.01 μm. The laser diode, photodiodes and optical waveguide are monolithically integrated on a GaAs substrate. This integration eliminates the difficult optical alignment and makes the sensor extremely small. The sensor is only 0.8 × 0.75 mm², and can therefore be directly attached at the place where the displacement is to be measured.

Original language	English
Pages (from-to)	942-947
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	13
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/13/6/317
Publication status	Published - Nov 1 2003

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/13/6/317

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Integrated micro-displacement sensor that uses beam divergence

Abstract

All Science Journal Classification (ASJC) codes

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