Integrated micro focusing and tracking sensor

Renshi Sawada, J. Shimada, E. Higurashi, T. Ito

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We have developed an integrated optical tracking and focusing sensor, which is a chip 1 mm by 0.5 mm. It can travel along guide patterns keeping a certain gap between itself and the guide pattern. It consists of a laser diode, monolithically fabricated photodiodes and microlenses having a graded refractive index distribution in the thickness direction. Experimental results showed that this integrated sensor can be used as a focusing and tracking sensor with sub-micron accuracy.

Original languageEnglish
Pages (from-to)71-77
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume9
Issue number1
DOIs
Publication statusPublished - Mar 1 1999
Externally publishedYes

Fingerprint

Sensors
Microlenses
Photodiodes
Semiconductor lasers
Refractive index
Direction compound

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Integrated micro focusing and tracking sensor. / Sawada, Renshi; Shimada, J.; Higurashi, E.; Ito, T.

In: Journal of Micromechanics and Microengineering, Vol. 9, No. 1, 01.03.1999, p. 71-77.

Research output: Contribution to journalArticle

Sawada, Renshi ; Shimada, J. ; Higurashi, E. ; Ito, T. / Integrated micro focusing and tracking sensor. In: Journal of Micromechanics and Microengineering. 1999 ; Vol. 9, No. 1. pp. 71-77.
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