Integrated micro focusing and tracking sensor

R. Sawada, J. Shimada, E. Higurashi, T. Ito

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)


    We have developed an integrated optical tracking and focusing sensor, which is a chip 1 mm by 0.5 mm. It can travel along guide patterns keeping a certain gap between itself and the guide pattern. It consists of a laser diode, monolithically fabricated photodiodes and microlenses having a graded refractive index distribution in the thickness direction. Experimental results showed that this integrated sensor can be used as a focusing and tracking sensor with sub-micron accuracy.

    Original languageEnglish
    Pages (from-to)71-77
    Number of pages7
    JournalJournal of Micromechanics and Microengineering
    Issue number1
    Publication statusPublished - Mar 1 1999

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Mechanics of Materials
    • Mechanical Engineering
    • Electrical and Electronic Engineering


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