Integrated micro focusing and tracking sensor

R. Sawada; J. Shimada; E. Higurashi; T. Ito

doi:10.1088/0960-1317/9/1/309

Integrated micro focusing and tracking sensor

R. Sawada, J. Shimada, E. Higurashi, T. Ito

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We have developed an integrated optical tracking and focusing sensor, which is a chip 1 mm by 0.5 mm. It can travel along guide patterns keeping a certain gap between itself and the guide pattern. It consists of a laser diode, monolithically fabricated photodiodes and microlenses having a graded refractive index distribution in the thickness direction. Experimental results showed that this integrated sensor can be used as a focusing and tracking sensor with sub-micron accuracy.

Original language	English
Pages (from-to)	71-77
Number of pages	7
Journal	Journal of Micromechanics and Microengineering
Volume	9
Issue number	1
DOIs	https://doi.org/10.1088/0960-1317/9/1/309
Publication status	Published - Mar 1 1999

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/9/1/309

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AU - Ito, T.

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Integrated micro focusing and tracking sensor

Abstract

All Science Journal Classification (ASJC) codes

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