Integrated micro-laser displacement sensor

Renshi Sawada, E. Higurashi, T. Ito, M. Tsubamoto, O. Ohguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

A new integrated optical microlaser displacement sensor including a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. It can measure the relative distance traveled against an outside reflective mirror. The measurement resolution is expected to be on the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed and can be incorporated into a micromachine because its inertia is extremely small.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Editors Anon
PublisherIEEE
Pages19-24
Number of pages6
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS - Nagoya, Jpn
Duration: Jan 26 1997Jan 30 1997

Other

OtherProceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS
CityNagoya, Jpn
Period1/26/971/30/97

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Sawada, R., Higurashi, E., Ito, T., Tsubamoto, M., & Ohguchi, O. (1997). Integrated micro-laser displacement sensor. In Anon (Ed.), Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 19-24). IEEE.