Integrated micro laser doppler velocimeter with 3-D structure

Eiji Higurashi, Tadatomo Suga, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Compact and thin micro laser Doppler velocimetry (LDV) sensor with 3-D structure (2.8 mm x 2.8 mm x 1 mm thick) was developed using Au-Au surface-activated bonding method (bonding temperature: 150 °C). It consists of two elements: a glass substrate with bonded photodiode chips, electrodes, and refractive microlenses; and a micromachined Si substrate with a submount, a bonded laser diode chip, micromirrors, and through-silicon vias. The feasibility of measuring velocity was demonstrated for various moving objects such as a reflective grating, an Au wire, and a light diffusing ground glass. The micro LDV sensor detected relative speeds as low as 0.4 μm/s and Doppler beat signal frequency showed good linearity to the relative velocity.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages2409-2412
Number of pages4
DOIs
Publication statusPublished - Dec 1 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

Fingerprint

Laser Doppler velocimeters
Velocity measurement
Microlenses
Glass
Lasers
Sensors
Substrates
Photodiodes
Semiconductor lasers
Wire
Silicon
Electrodes
Temperature

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Higurashi, E., Suga, T., & Sawada, R. (2010). Integrated micro laser doppler velocimeter with 3-D structure. In IEEE Sensors 2010 Conference, SENSORS 2010 (pp. 2409-2412). [5691000] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5691000

Integrated micro laser doppler velocimeter with 3-D structure. / Higurashi, Eiji; Suga, Tadatomo; Sawada, Renshi.

IEEE Sensors 2010 Conference, SENSORS 2010. 2010. p. 2409-2412 5691000 (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Higurashi, E, Suga, T & Sawada, R 2010, Integrated micro laser doppler velocimeter with 3-D structure. in IEEE Sensors 2010 Conference, SENSORS 2010., 5691000, Proceedings of IEEE Sensors, pp. 2409-2412, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, United States, 11/1/10. https://doi.org/10.1109/ICSENS.2010.5691000
Higurashi E, Suga T, Sawada R. Integrated micro laser doppler velocimeter with 3-D structure. In IEEE Sensors 2010 Conference, SENSORS 2010. 2010. p. 2409-2412. 5691000. (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5691000
Higurashi, Eiji ; Suga, Tadatomo ; Sawada, Renshi. / Integrated micro laser doppler velocimeter with 3-D structure. IEEE Sensors 2010 Conference, SENSORS 2010. 2010. pp. 2409-2412 (Proceedings of IEEE Sensors).
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