Integrated microlaser displacement sensor

Renshi Sawada, Eiji Higurashi, Takahiro Ito

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

A new integrated optical microlaser displacement sensor that includes a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. The sensor can measure the relative distance travelled against an outside reflective mirror. The measurement resolution is expected to be of the order of 0.01 μm. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed because its inertia is extremely small and can be incorporated into a microstage and microsystem.

Original languageEnglish
Pages (from-to)286-290
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number3
DOIs
Publication statusPublished - May 1 2002

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sensors
Sensors
Michelson interferometers
Microsystems
inertia
Mirrors
high speed
mirrors

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Integrated microlaser displacement sensor. / Sawada, Renshi; Higurashi, Eiji; Ito, Takahiro.

In: Journal of Micromechanics and Microengineering, Vol. 12, No. 3, 01.05.2002, p. 286-290.

Research output: Contribution to journalArticle

Sawada, Renshi ; Higurashi, Eiji ; Ito, Takahiro. / Integrated microlaser displacement sensor. In: Journal of Micromechanics and Microengineering. 2002 ; Vol. 12, No. 3. pp. 286-290.
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