Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electrical sensing of volatile molecular species in environments and/or from our bodies by using mobile electronics is an important issue for future electronic devices. This is because these sensor electronics will have an impact on our daily life and healthcare via collecting and analyzing data. Among various sensor materials, 'Metal Oxides' is one of the most abundant and robust materials in ambient atmosphere. However, metal oxide sensors have several essential difficulties when applying to CMOS sensor electronics. Here I show our recent progress as to integrated molecule recognition sensors by utilizing nano-metal oxides [1-3] on silicon.

Original languageEnglish
Title of host publication2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
ISBN (Electronic)9781538648254
DOIs
Publication statusPublished - Jul 3 2018
Event2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018 - Hsinchu, Taiwan, Province of China
Duration: Apr 16 2018Apr 19 2018

Other

Other2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
CountryTaiwan, Province of China
CityHsinchu
Period4/16/184/19/18

Fingerprint

Silicon
Oxides
metal oxides
Electronic equipment
Metals
Molecules
sensors
Sensors
silicon
electronics
molecules
CMOS
atmospheres

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Instrumentation
  • Electronic, Optical and Magnetic Materials

Cite this

Yanagida, T. (2018). Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon. In 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018 (pp. 1-2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/VLSI-TSA.2018.8403827

Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon. / Yanagida, Takeshi.

2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-2.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yanagida, T 2018, Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon. in 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018. Institute of Electrical and Electronics Engineers Inc., pp. 1-2, 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018, Hsinchu, Taiwan, Province of China, 4/16/18. https://doi.org/10.1109/VLSI-TSA.2018.8403827
Yanagida T. Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon. In 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-2 https://doi.org/10.1109/VLSI-TSA.2018.8403827
Yanagida, Takeshi. / Integrated molecule recognition sensor electronics using nanostructured metal oxides on silicon. 2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-2
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