Integrated optical encoder

Renshi Sawada

Research output: Contribution to conferencePaperpeer-review

19 Citations (Scopus)

Abstract

An integrated optical encoder consisting of a laser diode, monolithic photodiodes, and a fluorinated polyimide waveguide has been fabricated. It can determine which direction the grating scale is moving and can measure the relative displacement between the scale and the encoder, with a resolution on the order of 0.01 μm. By integrating the bulky components and using two beams emitted from two etched mirrors of the laser diode, this encoder is made as small as possible. The same design concept can be applied to other optical micro-sensors.

Original languageEnglish
Pages281-284
Number of pages4
Publication statusPublished - Dec 1 1995
Externally publishedYes
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: Jun 25 1995Jun 29 1995

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period6/25/956/29/95

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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