Integration of ceramic catalyst on micro-thermoelectric gas sensor

Woosuck Shin; Maiko Nishibori; Kazuki Tajima; Lionel F. Houlet; Yeongsoo Choi; Noriya Izu; Norimitsu Murayama; Ichiro Matsubara

doi:10.1016/j.snb.2006.04.033

Integration of ceramic catalyst on micro-thermoelectric gas sensor

Woosuck Shin, Maiko Nishibori, Kazuki Tajima, Lionel F. Houlet, Yeongsoo Choi, Noriya Izu, Norimitsu Murayama, Ichiro Matsubara

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

An integration technique of dispensing ceramic paste containing the particles of Pt loaded on alumina (Pt/alumina) on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS) has been developed. By changing the concentration of the catalyst particles in the paste, the viscosity of the paste was controlled to prepare the thick film catalyst of different thicknesses. The thickness of the catalyst was closely related to both the gas sensing performance and its temperature dependency of the μ-THS device. The sensor device with the moderate concentration of the Pt/alumina catalyst particle in the paste, 3.8% (v/v), showed the voltage signal of ca. 10 mV for the gas mixture of hydrogen/air, 1% (v/v) H₂ in air at catalyst temperature of 100 °C. The performances of the μ-THS with ceramic thick film catalyst and Pt thin film catalyst have been compared, and the influences of CO gas on their sensing performance have been investigated using in situ FT-IR test method. The better gas oxidation performance of the ceramic thick film than that of Pt thin film could remove out the adsorbed CO on the catalyst surface.

Original language	English
Pages (from-to)	283-291
Number of pages	9
Journal	Sensors and Actuators, B: Chemical
Volume	118
Issue number	1-2
DOIs	https://doi.org/10.1016/j.snb.2006.04.033
Publication status	Published - Oct 25 2006
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1016/j.snb.2006.04.033

Cite this

@article{374c3f945516408aa1b49b89c114d77e,

title = "Integration of ceramic catalyst on micro-thermoelectric gas sensor",

abstract = "An integration technique of dispensing ceramic paste containing the particles of Pt loaded on alumina (Pt/alumina) on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS) has been developed. By changing the concentration of the catalyst particles in the paste, the viscosity of the paste was controlled to prepare the thick film catalyst of different thicknesses. The thickness of the catalyst was closely related to both the gas sensing performance and its temperature dependency of the μ-THS device. The sensor device with the moderate concentration of the Pt/alumina catalyst particle in the paste, 3.8% (v/v), showed the voltage signal of ca. 10 mV for the gas mixture of hydrogen/air, 1% (v/v) H2 in air at catalyst temperature of 100 °C. The performances of the μ-THS with ceramic thick film catalyst and Pt thin film catalyst have been compared, and the influences of CO gas on their sensing performance have been investigated using in situ FT-IR test method. The better gas oxidation performance of the ceramic thick film than that of Pt thin film could remove out the adsorbed CO on the catalyst surface.",

author = "Woosuck Shin and Maiko Nishibori and Kazuki Tajima and Houlet, {Lionel F.} and Yeongsoo Choi and Noriya Izu and Norimitsu Murayama and Ichiro Matsubara",

note = "Funding Information: This work is supported by the New Energy and Industrial Technology Development Organization (NEDO), Japan. ",

year = "2006",

month = oct,

day = "25",

doi = "10.1016/j.snb.2006.04.033",

language = "English",

volume = "118",

pages = "283--291",

journal = "Sensors and Actuators B: Chemical",

issn = "0925-4005",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - Integration of ceramic catalyst on micro-thermoelectric gas sensor

AU - Shin, Woosuck

AU - Nishibori, Maiko

AU - Tajima, Kazuki

AU - Houlet, Lionel F.

AU - Choi, Yeongsoo

AU - Izu, Noriya

AU - Murayama, Norimitsu

AU - Matsubara, Ichiro

N1 - Funding Information: This work is supported by the New Energy and Industrial Technology Development Organization (NEDO), Japan.

PY - 2006/10/25

Y1 - 2006/10/25

N2 - An integration technique of dispensing ceramic paste containing the particles of Pt loaded on alumina (Pt/alumina) on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS) has been developed. By changing the concentration of the catalyst particles in the paste, the viscosity of the paste was controlled to prepare the thick film catalyst of different thicknesses. The thickness of the catalyst was closely related to both the gas sensing performance and its temperature dependency of the μ-THS device. The sensor device with the moderate concentration of the Pt/alumina catalyst particle in the paste, 3.8% (v/v), showed the voltage signal of ca. 10 mV for the gas mixture of hydrogen/air, 1% (v/v) H2 in air at catalyst temperature of 100 °C. The performances of the μ-THS with ceramic thick film catalyst and Pt thin film catalyst have been compared, and the influences of CO gas on their sensing performance have been investigated using in situ FT-IR test method. The better gas oxidation performance of the ceramic thick film than that of Pt thin film could remove out the adsorbed CO on the catalyst surface.

AB - An integration technique of dispensing ceramic paste containing the particles of Pt loaded on alumina (Pt/alumina) on thin membrane of micro-thermoelectric hydrogen sensor (μ-THS) has been developed. By changing the concentration of the catalyst particles in the paste, the viscosity of the paste was controlled to prepare the thick film catalyst of different thicknesses. The thickness of the catalyst was closely related to both the gas sensing performance and its temperature dependency of the μ-THS device. The sensor device with the moderate concentration of the Pt/alumina catalyst particle in the paste, 3.8% (v/v), showed the voltage signal of ca. 10 mV for the gas mixture of hydrogen/air, 1% (v/v) H2 in air at catalyst temperature of 100 °C. The performances of the μ-THS with ceramic thick film catalyst and Pt thin film catalyst have been compared, and the influences of CO gas on their sensing performance have been investigated using in situ FT-IR test method. The better gas oxidation performance of the ceramic thick film than that of Pt thin film could remove out the adsorbed CO on the catalyst surface.

UR - http://www.scopus.com/inward/record.url?scp=33747840343&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33747840343&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2006.04.033

DO - 10.1016/j.snb.2006.04.033

M3 - Article

AN - SCOPUS:33747840343

SN - 0925-4005

VL - 118

SP - 283

EP - 291

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 1-2

ER -

Integration of ceramic catalyst on micro-thermoelectric gas sensor

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this