シリコーン上へのマイクロレーザー導波路デバイスの集積化

Translated title of the contribution: Integration of Laser Waveguides on Silicone Micro Device

Research output: Contribution to journalArticle

Translated title of the contributionIntegration of Laser Waveguides on Silicone Micro Device
Original languageJapanese
Pages (from-to)216-221
Number of pages6
Journal材料の科学と工学 = Materials science and technology
Volume47
Issue number5
Publication statusPublished - Oct 20 2010

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