Investigation of carrier lifetimes in a thin 4H-SiC epilayer

Haigui Yang, Jinsong Gao, Hiroshi Nakashima

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    High-injection carrier lifetimes in thin 4H-SiC epilayers were investigated by using time-resolved photoluminescence method. It was found that the lifetimes in thin 4H-SiC epilayers were much shorter than that in relatively thick epilayers. Surface passivation using SiO2 and SiN films, as well as numerical simulation based on a diffusion equation were performed in order to clarify lifetime limiting factors. A comparison between experimental and theoretical results reveals that the major cause of extremely short carrier lifetimes in thin 4H-SiC epilayers is short bulk lifetime rather than recombination at the epilayer surface or in the substrate.

    Original languageEnglish
    Title of host publicationProceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
    EditorsJia Zhou, Ting-Ao Tang
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    ISBN (Electronic)9781479932962
    DOIs
    Publication statusPublished - Jan 23 2014
    Event2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 - Guilin, China
    Duration: Oct 28 2014Oct 31 2014

    Publication series

    NameProceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014

    Other

    Other2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
    CountryChina
    CityGuilin
    Period10/28/1410/31/14

    Fingerprint

    Carrier lifetime
    Epilayers
    Passivation
    Photoluminescence
    Computer simulation
    Substrates

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Electrical and Electronic Engineering
    • Computer Science Applications

    Cite this

    Yang, H., Gao, J., & Nakashima, H. (2014). Investigation of carrier lifetimes in a thin 4H-SiC epilayer. In J. Zhou, & T-A. Tang (Eds.), Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 [7021654] (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSICT.2014.7021654

    Investigation of carrier lifetimes in a thin 4H-SiC epilayer. / Yang, Haigui; Gao, Jinsong; Nakashima, Hiroshi.

    Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. ed. / Jia Zhou; Ting-Ao Tang. Institute of Electrical and Electronics Engineers Inc., 2014. 7021654 (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Yang, H, Gao, J & Nakashima, H 2014, Investigation of carrier lifetimes in a thin 4H-SiC epilayer. in J Zhou & T-A Tang (eds), Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014., 7021654, Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014, Institute of Electrical and Electronics Engineers Inc., 2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014, Guilin, China, 10/28/14. https://doi.org/10.1109/ICSICT.2014.7021654
    Yang H, Gao J, Nakashima H. Investigation of carrier lifetimes in a thin 4H-SiC epilayer. In Zhou J, Tang T-A, editors, Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. Institute of Electrical and Electronics Engineers Inc. 2014. 7021654. (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014). https://doi.org/10.1109/ICSICT.2014.7021654
    Yang, Haigui ; Gao, Jinsong ; Nakashima, Hiroshi. / Investigation of carrier lifetimes in a thin 4H-SiC epilayer. Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014. editor / Jia Zhou ; Ting-Ao Tang. Institute of Electrical and Electronics Engineers Inc., 2014. (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014).
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