@inproceedings{42a3b7c9dea14f4ca1057d627453c04a,
title = "Investigation of carrier lifetimes in a thin 4H-SiC epilayer",
abstract = "High-injection carrier lifetimes in thin 4H-SiC epilayers were investigated by using time-resolved photoluminescence method. It was found that the lifetimes in thin 4H-SiC epilayers were much shorter than that in relatively thick epilayers. Surface passivation using SiO2 and SiN films, as well as numerical simulation based on a diffusion equation were performed in order to clarify lifetime limiting factors. A comparison between experimental and theoretical results reveals that the major cause of extremely short carrier lifetimes in thin 4H-SiC epilayers is short bulk lifetime rather than recombination at the epilayer surface or in the substrate.",
author = "Haigui Yang and Jinsong Gao and Hiroshi Nakashima",
year = "2014",
month = jan,
day = "23",
doi = "10.1109/ICSICT.2014.7021654",
language = "English",
series = "Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Jia Zhou and Ting-Ao Tang",
booktitle = "Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014",
address = "United States",
note = "2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 ; Conference date: 28-10-2014 Through 31-10-2014",
}