Investigation of metallic interdiffusion in Al x Ga 1-x N/GaN/sapphire heterostructures used for microelectronic devices by SEM/EDX and SIMS depth profiling

Helena Tellez Lozano, J. M. Vadillo, J. J. Laserna

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Secondary ion mass spectrometry (SIMS) depth profiling has been applied to the study of the thermal annealing of ohmic contacts for high electron mobility transistors. The metallic stacks (Ti/Al/Ni/Au) were deposited over the Al 0.28Ga0.72N/GaN/sapphire heterostructures and subjected to a rapid thermal annealing (850 °C for 30 s under N2 atmosphere) to improve the contact performance. The surface morphology and the in-depth chemical distribution of the layered contacts were severely modified due to the treatment. These modifications have been analyzed by SIMS depth profiling and scanning electron microscopy-energy-dispersive X-ray microanalysis. The SIMS analysis conditions have been optimized to achieve simultaneously good sensitivity and to avoid ion-induced mixing effects produced by the primary beam sputtering.

Original languageEnglish
Pages (from-to)2865-2871
Number of pages7
JournalAnalytical and Bioanalytical Chemistry
Volume397
Issue number7
DOIs
Publication statusPublished - Aug 1 2010

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Secondary Ion Mass Spectrometry
Depth profiling
Aluminum Oxide
Secondary ion mass spectrometry
Microelectronics
Heterojunctions
Energy dispersive spectroscopy
Equipment and Supplies
Scanning electron microscopy
Hot Temperature
Electron Probe Microanalysis
Ohmic contacts
Rapid thermal annealing
High electron mobility transistors
Atmosphere
Electron Scanning Microscopy
Surface morphology
Sputtering
Electrons
Annealing

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Biochemistry

Cite this

Investigation of metallic interdiffusion in Al x Ga 1-x N/GaN/sapphire heterostructures used for microelectronic devices by SEM/EDX and SIMS depth profiling. / Tellez Lozano, Helena; Vadillo, J. M.; Laserna, J. J.

In: Analytical and Bioanalytical Chemistry, Vol. 397, No. 7, 01.08.2010, p. 2865-2871.

Research output: Contribution to journalArticle

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