Investigation of metallic interdiffusion in Al x Ga 1-x N/GaN/sapphire heterostructures used for microelectronic devices by SEM/EDX and SIMS depth profiling

H. Téllez, J. M. Vadillo, J. J. Laserna

    Research output: Contribution to journal › Article › peer-review

    3 Citations (Scopus)

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    Medicine & Life Sciences

    Chemical Compounds