Investigation of Particulate Growth Processes in RF Silane Plasmas Using Light Absorption and Scanning Electron Microscopic Methods

Hiroharu Kawasaki, Tsuyoshi Fukuzawa, Hideto Tsuruoka, Takashi Yoshioka, Masaharu Shiratani, Yukio Watanabe

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy