Investigation of plasma parameters in a VHF plasma with narrow gap under high gaseous pressure

Hiroshi Muta, Shinichi Kishida, Masayoshi Tanaka, Yasuhiro Yamauchi, Tomoyoshi Baba, Yoshiaki Takeuchi, Hiromu Takatsuka, Yoshinobu Kawai

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    3 Citations (Scopus)

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    Chemical Compounds

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