Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence

W. Z. Park, T. Eguchi, C. Honda, K. Muraoka, Yukihiko Yamagata, B. W. James, M. Maeda, M. Akazaki

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

The thermalization of sputtered atoms in a magnetron discharge was investigated using laser-induced fluorescence. The results clearly indicated for the first time that the velocity distribution agrees well with the Thompson formula [M. W. Thompson, Philos. Mag. 18, 377 (1968)] for d/λ≪1, while a thermalized component becomes appreciable for d/λ≳1, where d is the distance from the cathode surface and λ is the mean free path of sputtered atoms for collisions with filling gas atoms.

Original languageEnglish
Pages (from-to)2564-2566
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number22
DOIs
Publication statusPublished - Dec 1 1991

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laser induced fluorescence
atoms
mean free path
velocity distribution
cathodes
collisions
gases

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence. / Park, W. Z.; Eguchi, T.; Honda, C.; Muraoka, K.; Yamagata, Yukihiko; James, B. W.; Maeda, M.; Akazaki, M.

In: Applied Physics Letters, Vol. 58, No. 22, 01.12.1991, p. 2564-2566.

Research output: Contribution to journalArticle

Park, WZ, Eguchi, T, Honda, C, Muraoka, K, Yamagata, Y, James, BW, Maeda, M & Akazaki, M 1991, 'Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence', Applied Physics Letters, vol. 58, no. 22, pp. 2564-2566. https://doi.org/10.1063/1.104827
Park, W. Z. ; Eguchi, T. ; Honda, C. ; Muraoka, K. ; Yamagata, Yukihiko ; James, B. W. ; Maeda, M. ; Akazaki, M. / Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence. In: Applied Physics Letters. 1991 ; Vol. 58, No. 22. pp. 2564-2566.
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