Investigation of the thermalization of sputtered atoms in a magnetron discharge using laser-induced fluorescence

W. Z. Park, T. Eguchi, C. Honda, K. Muraoka, Y. Yamagata, B. W. James, M. Maeda, M. Akazaki

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

The thermalization of sputtered atoms in a magnetron discharge was investigated using laser-induced fluorescence. The results clearly indicated for the first time that the velocity distribution agrees well with the Thompson formula [M. W. Thompson, Philos. Mag. 18, 377 (1968)] for d/λ≪1, while a thermalized component becomes appreciable for d/λ≳1, where d is the distance from the cathode surface and λ is the mean free path of sputtered atoms for collisions with filling gas atoms.

Original languageEnglish
Pages (from-to)2564-2566
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number22
DOIs
Publication statusPublished - 1991

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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