Investigation on bistability and fabrication of bistable prestressed curved beam

Ivransa Zuhdi Pane, Tanemasa Asano

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)

Abstract

We investigated the bistability of bistable prestressed curved beam based on the theory of Euler buckling and the principle of the least energy. The bistability was found to be much affected by the ratio of the initial apex to the thickness of the curved beam. Using a standard silicon process, we fabricated curved beams made of single crystal Si. Voltage was then applied to the fabricated curved beams to generate capacitive electrostatic actuation force. The snap-through was confirmed in the range of 20 to 30 V apply voltage.

Original languageEnglish
Pages (from-to)5291-5296
Number of pages6
JournalJapanese journal of applied physics
Volume47
Issue number6 PART 2
DOIs
Publication statusPublished - Jun 20 2008

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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