Investigations on the energy balance of the substrate during ZnO magnetron sputtering

S. Bornholdt, K. Kuwahara, Naho Itagaki, H. Wulff, Masaharu Shiratani, H. Kersten

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
Pages1038-1041
Number of pages4
Publication statusPublished - Dec 1 2012
Event39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics - Stockholm, Sweden
Duration: Jul 2 2012Jul 6 2012

Publication series

Name39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
Volume2

Other

Other39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
CountrySweden
CityStockholm
Period7/2/127/6/12

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

Cite this

Bornholdt, S., Kuwahara, K., Itagaki, N., Wulff, H., Shiratani, M., & Kersten, H. (2012). Investigations on the energy balance of the substrate during ZnO magnetron sputtering. In 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics (pp. 1038-1041). (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics; Vol. 2).

Investigations on the energy balance of the substrate during ZnO magnetron sputtering. / Bornholdt, S.; Kuwahara, K.; Itagaki, Naho; Wulff, H.; Shiratani, Masaharu; Kersten, H.

39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 2012. p. 1038-1041 (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bornholdt, S, Kuwahara, K, Itagaki, N, Wulff, H, Shiratani, M & Kersten, H 2012, Investigations on the energy balance of the substrate during ZnO magnetron sputtering. in 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics, vol. 2, pp. 1038-1041, 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics, Stockholm, Sweden, 7/2/12.
Bornholdt S, Kuwahara K, Itagaki N, Wulff H, Shiratani M, Kersten H. Investigations on the energy balance of the substrate during ZnO magnetron sputtering. In 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 2012. p. 1038-1041. (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics).
Bornholdt, S. ; Kuwahara, K. ; Itagaki, Naho ; Wulff, H. ; Shiratani, Masaharu ; Kersten, H. / Investigations on the energy balance of the substrate during ZnO magnetron sputtering. 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 2012. pp. 1038-1041 (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics).
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