Investigations on the energy balance of the substrate during ZnO magnetron sputtering

S. Bornholdt; K. Kuwahara; Naho Itagaki; H. Wulff; Masaharu Shiratani; H. Kersten

Investigations on the energy balance of the substrate during ZnO magnetron sputtering

S. Bornholdt, K. Kuwahara, Naho Itagaki, H. Wulff, Masaharu Shiratani, H. Kersten

Electronic Devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
Pages	1038-1041
Number of pages	4
Publication status	Published - Dec 1 2012
Event	39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics - Stockholm, Sweden Duration: Jul 2 2012 → Jul 6 2012

Publication series

Name	39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
Volume	2

Other

Other	39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics
Country/Territory	Sweden
City	Stockholm
Period	7/2/12 → 7/6/12

All Science Journal Classification (ASJC) codes

Condensed Matter Physics

Cite this

Bornholdt, S., Kuwahara, K., Itagaki, N., Wulff, H., Shiratani, M., & Kersten, H. (2012). Investigations on the energy balance of the substrate during ZnO magnetron sputtering. In 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics (pp. 1038-1041). (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics; Vol. 2).

Investigations on the energy balance of the substrate during ZnO magnetron sputtering. / Bornholdt, S.; Kuwahara, K.; Itagaki, Naho et al.

39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 2012. p. 1038-1041 (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bornholdt, S, Kuwahara, K, Itagaki, N, Wulff, H, Shiratani, M & Kersten, H 2012, Investigations on the energy balance of the substrate during ZnO magnetron sputtering. in 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics, vol. 2, pp. 1038-1041, 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics, Stockholm, Sweden, 7/2/12.

Bornholdt S, Kuwahara K, Itagaki N, Wulff H, Shiratani M, Kersten H. Investigations on the energy balance of the substrate during ZnO magnetron sputtering. In 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 2012. p. 1038-1041. (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics).

Bornholdt, S. ; Kuwahara, K. ; Itagaki, Naho et al. / Investigations on the energy balance of the substrate during ZnO magnetron sputtering. 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. 2012. pp. 1038-1041 (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics).

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AU - Shiratani, Masaharu

AU - Kersten, H.

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Investigations on the energy balance of the substrate during ZnO magnetron sputtering

Publication series

Other

All Science Journal Classification (ASJC) codes

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Cite this