TY - JOUR
T1 - Ion beam alignment for liquid crystal display fabrication
AU - Doyle, J. P.
AU - Chaudhari, P.
AU - Lacey, J. L.
AU - Galligan, E. A.
AU - Lien, S. C.
AU - Callegari, A. C.
AU - Lang, N. D.
AU - Lu, M.
AU - Nakagawa, Y.
AU - Nakano, H.
AU - Okazaki, N.
AU - Odahara, S.
AU - Kato, Yoshimine
AU - Saitoh, Y.
AU - Sakai, K.
AU - Satoh, H.
AU - Shiota, Y.
PY - 2003/5/1
Y1 - 2003/5/1
N2 - The ability to align liquid crystals to a substrate is a critical step in the liquid crystal display (LCD) manufacturing process with the industry standard technique employing a mechanical rubbing technique to accomplish this function. However, mechanical rubbing can result in debris generation contaminating not only the substrate being processed but also the clean room housing the equipment. As such, post-cleaning of the display panels is required to remove the debris from the surface in addition to the physical isolation of the mechanical rubbing equipment within the clean room environment introducing considerable time and expense. In addition, uneven wear of the mechanical roller during the rubbing process may result in localized defects that will not be observed until final inspection of a completely assembled display. We have developed and introduced into LCD manufacturing a non-contact alignment technique utilizing both diamond-like carbon (DLC) and a low energy ion beam (IB). The replacement of the polyimide alignment layer with DLC results in a completely dry processing technique for both the thin film deposition and alignment steps.
AB - The ability to align liquid crystals to a substrate is a critical step in the liquid crystal display (LCD) manufacturing process with the industry standard technique employing a mechanical rubbing technique to accomplish this function. However, mechanical rubbing can result in debris generation contaminating not only the substrate being processed but also the clean room housing the equipment. As such, post-cleaning of the display panels is required to remove the debris from the surface in addition to the physical isolation of the mechanical rubbing equipment within the clean room environment introducing considerable time and expense. In addition, uneven wear of the mechanical roller during the rubbing process may result in localized defects that will not be observed until final inspection of a completely assembled display. We have developed and introduced into LCD manufacturing a non-contact alignment technique utilizing both diamond-like carbon (DLC) and a low energy ion beam (IB). The replacement of the polyimide alignment layer with DLC results in a completely dry processing technique for both the thin film deposition and alignment steps.
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U2 - 10.1016/S0168-583X(03)00796-1
DO - 10.1016/S0168-583X(03)00796-1
M3 - Conference article
AN - SCOPUS:0038751722
VL - 206
SP - 467
EP - 471
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
T2 - 13th International conference on Ion beam modification of Mate
Y2 - 1 September 2002 through 6 September 2002
ER -