Effect of argon ion bombardment (AIB) on performance of solution-processed single-walled carbon nanotube (SWCNT) thin film transistor (TFT) has been investigated. AIB was applied to the source/drain contacts to reduce contact resistance. It was found that AIB enhances on-state current of TFT. Over 5 decades' on/off ratio is obtained by applying AIB. Results of transmission line method using metallic SWCNT clearly indicate that contact resistance between CNT network and Au electrode is reduced by the application of AIB.
|Journal||Japanese journal of applied physics|
|Issue number||9 PART 1|
|Publication status||Published - Sept 2011|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)