Atomistic structure of ion-beam-induced amorphous silicon carbide (a-SiC) has been investigated by cross-sectional transmission electron microscopy. The electron intensities of halo patterns recorded on imaging plates were digitized quantitatively to extract reduced interference functions. We demonstrated the relationship between maximum scattering vector (Qmax) measured in scattering experiments and the resolution of the corresponding pair-distribution function by changing Qmax values from 160 to 230 nm-1. The results revealed that the C-C peak becomes broadened and eventually a shoulder as the Qmax value becomes shorter, indicating that Qmax values of <160 nm-1 measured in previous studies are not enough to detect C-C homonuclear bonds in a-SiC. We are the first to reveal the existence of C-C and Si-Si homonuclear bonds in a-SiC using a diffraction technique.
|Number of pages||5|
|Journal||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - May 2003|
|Event||13th International conference on Ion beam modification of Mate - Kobe, Japan|
Duration: Sep 1 2002 → Sep 6 2002
All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics