Ion-beam irradiation effect on solid-phase growth of β-FeSi2

Y. Murakami, H. Kido, A. Kenjo, T. Sadoh, T. Yoshitake, M. Miyao

Research output: Contribution to journalConference article

9 Citations (Scopus)

Abstract

Effects of Ar+ ion-beam irradiation on solid-phase growth of β-FeSi2 have been investigated. Fe (10 nm)/Si structures were irradiated with 25 keV Ar+(5.0 × 1015 cm-2) at a temperature of 25°C (sample A) or 400°C (sample B), and subsequently annealed at 800°C. A reference was obtained after annealing without irradiation (sample C). X-ray diffraction results indicated that β-FeSi2 was formed after annealing at 800°C for 5 h, and the formation rate was the fastest for sample A and the slowest for sample C, i.e., A > B≫C. However, Auger electron spectroscopy measurements showed that atomic mixing at Fe/Si interface before annealing was B > A≫C. These results suggested that amorphization of Si substrate, in addition to atomic mixing, enhanced the solid-phase growth of β-FeSi2, which was confirmed experimentally. Moreover, a direct band gap of 0.89 eV was observed for the sample with pre-amorphization by the Fourier-transform infrared (FT-IR) spectroscopy measurements. These enhancement effects were attributed to that the phase transition to β-FeSi2 was accelerated by atomic arrangement induced during annihilation of excess vacancies. These enhancement effects can be utilized for nano-fabrication of β-FeSi2 by using focused ion-beam irradiation.

Original languageEnglish
Pages (from-to)505-508
Number of pages4
JournalPhysica E: Low-Dimensional Systems and Nanostructures
Volume16
Issue number3-4
DOIs
Publication statusPublished - Mar 1 2003
EventSymposium H of the Spring Meeting of the Europe (E-MRS-02H) - Strasbourgh, France
Duration: Jun 18 2002Jun 21 2002

Fingerprint

Ion beams
solid phases
Amorphization
ion beams
Irradiation
Annealing
irradiation
Focused ion beams
Auger electron spectroscopy
Nanotechnology
annealing
Vacancies
Fourier transform infrared spectroscopy
Energy gap
Phase transitions
X ray diffraction
augmentation
nanofabrication
Substrates
Auger spectroscopy

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

Ion-beam irradiation effect on solid-phase growth of β-FeSi2. / Murakami, Y.; Kido, H.; Kenjo, A.; Sadoh, T.; Yoshitake, T.; Miyao, M.

In: Physica E: Low-Dimensional Systems and Nanostructures, Vol. 16, No. 3-4, 01.03.2003, p. 505-508.

Research output: Contribution to journalConference article

Murakami, Y. ; Kido, H. ; Kenjo, A. ; Sadoh, T. ; Yoshitake, T. ; Miyao, M. / Ion-beam irradiation effect on solid-phase growth of β-FeSi2. In: Physica E: Low-Dimensional Systems and Nanostructures. 2003 ; Vol. 16, No. 3-4. pp. 505-508.
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