Ion Irradiation Stimulated Crystal Nucleation in Amorphous Si on SiO_2

Masanobu Miyao, Isao Tsunoda, Taizoh Sadoh, Atsushi Kenjo

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)442-443
Number of pages2
JournalExtended abstracts of the ... Conference on Solid State Devices and Materials
Volume2000
Publication statusPublished - Aug 28 2000

Cite this