Ion probe measurement of Fe species ejected by KrF laser ablation of Fe in ambient nitrogen gas

    Research output: Contribution to journalArticle

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    Abstract

    Time-resolved ion current measurements for laser ablation of Fe in nitrogen gas were performed. The current due to electrons, N2 +, Fe ion and Fe neutral was observed at the substrate. At nitrogen pressures between 1×10-3 Torr and 1×10-1 Torr, the amount and the velocity of the Fe ion arriving at the substrate increased as the nitrogen pressure was increased. The velocity of the Fe ion was approximately 60 km/s and the maximum amount of it was estimated to be not more than 0.3 percent of the ejected Fe species. The Fe-N thin films prepared in this nitrogen pressure region showed the highest (200) orientation and increase of the crystallite size. It is considered that the Fe ion arriving at the substrate has the effect of enhancing the mobility of deposited species, resulting in the generation of the highest oriented Fe-N thin film composed of the largest crystallites.

    Original languageEnglish
    Pages (from-to)1469-1474
    Number of pages6
    JournalJournal of Materials Science
    Volume35
    Issue number6
    DOIs
    Publication statusPublished - 2000

    Fingerprint

    Laser ablation
    Nitrogen
    Gases
    Ions
    Substrates
    Thin films
    Electric current measurement
    Crystallite size
    Crystallites
    Electrons

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Mechanics of Materials
    • Mechanical Engineering

    Cite this

    Ion probe measurement of Fe species ejected by KrF laser ablation of Fe in ambient nitrogen gas. / Yoshitake, Tsuyoshi.

    In: Journal of Materials Science, Vol. 35, No. 6, 2000, p. 1469-1474.

    Research output: Contribution to journalArticle

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