Is the bulk mode conversion important in high density helicon plasma?

Shogo Isayama, Tohru Hada, Shunjiro Shinohara, Takao Tanikawa

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In a high-density helicon plasma production process, a contribution of Trivelpiece-Gould (TG) wave for surface power deposition is widely accepted. The TG wave can be excited either due to an abrupt density gradient near the plasma edge (surface conversion) or due to linear mode conversion from the helicon wave in a density gradient in the bulk region (bulk mode conversion). By numerically solving the boundary value problem of linear coupling between the helicon and the TG waves in a background with density gradient, we show that the efficiency of the bulk mode conversion strongly depends on the dissipation included in the plasma, and the bulk mode conversion is important when the dissipation is small. Also, by performing FDTD simulation, we show the time evolution of energy flux associated with the helicon and the TG waves.

Original languageEnglish
Article number063513
JournalPhysics of Plasmas
Volume23
Issue number6
DOIs
Publication statusPublished - Jun 1 2016

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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