Large-scale, heterogeneous integration of nanowire arrays for image sensor circuitry

Zhiyong Fan, Johnny C. Ho, Zachery A. Jacobson, Haleh Razavi, Ali Javey

Research output: Contribution to journalArticlepeer-review

209 Citations (Scopus)

Abstract

We report large-scale integration of nanowires for heterogeneous, multifunctional circuitry that utilizes both the sensory and electronic functionalities of single crystalline nanomaterials. Highly ordered and parallel arrays of optically active CdSe nanowires and high-mobility Ge/Si nanowires are deterministically positioned on substrates, and configured as photodiodes and transistors, respectively. The nanowire sensors and electronic devices are then interfaced to enable an all-nanowire circuitry with on-chip integration, capable of detecting and amplifying an optical signal with high sensitivity and precision. Notably, the process is highly reproducible and scalable with a yield of ≈80% functional circuits, therefore, enabling the fabrication of large arrays (i.e., 13 x 20) of nanowire photosensor circuitry with image-sensing functionality. The ability to interface nanowire sensors with integrated electronics on large scales and with high uniformity presents an important advance toward the integration of nanomaterials for sensor applications.

Original languageEnglish
Pages (from-to)11066-11070
Number of pages5
JournalProceedings of the National Academy of Sciences of the United States of America
Volume105
Issue number32
DOIs
Publication statusPublished - Aug 12 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • General

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