Laser ablated plasma plume characteristics for photocatalyst TiO 2 thin films preparation

Tamiko Ohshima; Shouta Nakashima; Tsuyoshi Ueda; Hiroharu Kawasaki; Yoshiaki Suda; Kenji Ebihara

doi:10.1016/j.tsf.2005.08.042

Laser ablated plasma plume characteristics for photocatalyst TiO ₂ thin films preparation

Tamiko Ohshima, Shouta Nakashima, Tsuyoshi Ueda, Hiroharu Kawasaki, Yoshiaki Suda, Kenji Ebihara

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

The TiO₂ plasma plume produced by pulsed laser deposition (PLD) using a Nd:YAG laser (532 nm) is investigated by temporal and spatial resolved optical emission spectroscopy. Dynamics of neutral and ionized titanium species in the plume agreed with a drag model, which was explained as a collision between the excited species and ambient gas. The velocity of neutral oxygen atoms is constant in spite of increasing the delay time after the laser irradiation and the distance from the target. The crystallinity of TiO ₂ films deposited in the ablation plasma of Ti and TiN target was higher than that of TiO₂ target.

Original language	English
Pages (from-to)	106-110
Number of pages	5
Journal	Thin Solid Films
Volume	506-507
DOIs	https://doi.org/10.1016/j.tsf.2005.08.042
Publication status	Published - May 26 2006
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2005.08.042

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title = "Laser ablated plasma plume characteristics for photocatalyst TiO 2 thin films preparation",

abstract = "The TiO2 plasma plume produced by pulsed laser deposition (PLD) using a Nd:YAG laser (532 nm) is investigated by temporal and spatial resolved optical emission spectroscopy. Dynamics of neutral and ionized titanium species in the plume agreed with a drag model, which was explained as a collision between the excited species and ambient gas. The velocity of neutral oxygen atoms is constant in spite of increasing the delay time after the laser irradiation and the distance from the target. The crystallinity of TiO 2 films deposited in the ablation plasma of Ti and TiN target was higher than that of TiO2 target.",

author = "Tamiko Ohshima and Shouta Nakashima and Tsuyoshi Ueda and Hiroharu Kawasaki and Yoshiaki Suda and Kenji Ebihara",

year = "2006",

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day = "26",

doi = "10.1016/j.tsf.2005.08.042",

language = "English",

volume = "506-507",

pages = "106--110",

journal = "Thin Solid Films",

issn = "0040-6090",

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TY - JOUR

T1 - Laser ablated plasma plume characteristics for photocatalyst TiO 2 thin films preparation

AU - Ohshima, Tamiko

AU - Nakashima, Shouta

AU - Ueda, Tsuyoshi

AU - Kawasaki, Hiroharu

AU - Suda, Yoshiaki

AU - Ebihara, Kenji

PY - 2006/5/26

Y1 - 2006/5/26

N2 - The TiO2 plasma plume produced by pulsed laser deposition (PLD) using a Nd:YAG laser (532 nm) is investigated by temporal and spatial resolved optical emission spectroscopy. Dynamics of neutral and ionized titanium species in the plume agreed with a drag model, which was explained as a collision between the excited species and ambient gas. The velocity of neutral oxygen atoms is constant in spite of increasing the delay time after the laser irradiation and the distance from the target. The crystallinity of TiO 2 films deposited in the ablation plasma of Ti and TiN target was higher than that of TiO2 target.

AB - The TiO2 plasma plume produced by pulsed laser deposition (PLD) using a Nd:YAG laser (532 nm) is investigated by temporal and spatial resolved optical emission spectroscopy. Dynamics of neutral and ionized titanium species in the plume agreed with a drag model, which was explained as a collision between the excited species and ambient gas. The velocity of neutral oxygen atoms is constant in spite of increasing the delay time after the laser irradiation and the distance from the target. The crystallinity of TiO 2 films deposited in the ablation plasma of Ti and TiN target was higher than that of TiO2 target.

UR - http://www.scopus.com/inward/record.url?scp=33645232406&partnerID=8YFLogxK

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U2 - 10.1016/j.tsf.2005.08.042

DO - 10.1016/j.tsf.2005.08.042

M3 - Article

AN - SCOPUS:33645232406

SN - 0040-6090

VL - 506-507

SP - 106

EP - 110

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Laser ablated plasma plume characteristics for photocatalyst TiO ₂ thin films preparation

Abstract

All Science Journal Classification (ASJC) codes

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