TY - JOUR
T1 - Laser damage properties of optical coatings with nanoscale layers grown by atomic layer deposition
AU - Zaitsu, Sbin Ichi
AU - Motokoshi, Shinji
AU - Jitsuno, Takahisa
AU - Nakatsuka, Masahiro
AU - Yamanaka, Tatsuhiko
PY - 2004/3
Y1 - 2004/3
N2 - The notable change in the structure and laser damage properties of coatings using periodically incorporated Al2O3 nanoscale layers grown by atomic layer deposition is demonstrated. Coatings with a nanoscale laminated structure had a higher transparency than pure TiO2 films grown at 400°C. The laser damage resistance of nanolaminate coatings is three times larger than that of pure TiO2 films. The morphology of laser-induced damage shows a significant reduction in the number of damage sites.
AB - The notable change in the structure and laser damage properties of coatings using periodically incorporated Al2O3 nanoscale layers grown by atomic layer deposition is demonstrated. Coatings with a nanoscale laminated structure had a higher transparency than pure TiO2 films grown at 400°C. The laser damage resistance of nanolaminate coatings is three times larger than that of pure TiO2 films. The morphology of laser-induced damage shows a significant reduction in the number of damage sites.
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U2 - 10.1143/JJAP.43.1034
DO - 10.1143/JJAP.43.1034
M3 - Article
AN - SCOPUS:2442437008
VL - 43
SP - 1034
EP - 1035
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 3
ER -