Laser damage properties of optical coatings with nanoscale layers grown by atomic layer deposition

Sbin Ichi Zaitsu, Shinji Motokoshi, Takahisa Jitsuno, Masahiro Nakatsuka, Tatsuhiko Yamanaka

    Research output: Contribution to journalArticlepeer-review

    18 Citations (Scopus)

    Abstract

    The notable change in the structure and laser damage properties of coatings using periodically incorporated Al2O3 nanoscale layers grown by atomic layer deposition is demonstrated. Coatings with a nanoscale laminated structure had a higher transparency than pure TiO2 films grown at 400°C. The laser damage resistance of nanolaminate coatings is three times larger than that of pure TiO2 films. The morphology of laser-induced damage shows a significant reduction in the number of damage sites.

    Original languageEnglish
    Pages (from-to)1034-1035
    Number of pages2
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume43
    Issue number3
    DOIs
    Publication statusPublished - Mar 2004

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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