Laser deposition of Y1BA2Cu3O7-δ-SrTiO 3-Y11BA2Cu3O 7-δ multilayers utilizing the 4th harmonics of Nd:YAG pulse laser

Takanobu Kiss, Keiji Enpuku, Tatsuya Matsumura, Yasunori Iriyama, Taketsune Nakamura, Masakatsu Takeo

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


The 4th harmonics of a Nd:YAG laser beam (266 nm) is applied to fabricate highly oriented YiBa2Cu3 OJ.j-SrTiOs-YiBazCujOy-j multilayer structures. It has been shown that the emission temperature of a film surface will change during deposition, depending on deposition conditions, even though the heater temperature is constant. The change of substrate temperature is strongly correlated to film characteristics such as critical temperature, c-axis length, and resistivity. The in situ monitoring of the substrate temperature is useful for obtaining high-quality YiBa2Cu3O7-j films reproducibly. It is also shown that a SrTiO3 layer prevents oxygen restoration in a YiBa2Cu3O7-« underlayer. The relationship between oxygen deficiency and the annealing conditions is studied.

Original languageEnglish
Pages (from-to)1269-1273
Number of pages5
JournalIEICE Transactions on Electronics
Issue number9
Publication statusPublished - Jan 1 1996

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


Dive into the research topics of 'Laser deposition of Y<sub>1</sub>BA<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub>-SrTiO <sub>3</sub>-Y<sub>11</sub>BA<sub>2</sub>Cu<sub>3</sub>O <sub>7-δ</sub> multilayers utilizing the 4th harmonics of Nd:YAG pulse laser'. Together they form a unique fingerprint.

Cite this