Laser-imaging of laser-produced tin plume behavior for EUV light source

Daisuke Nakamura, Yuki Hashimoto, Koji Tamaru, Akihiko Takahashi, Tatsuo Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PublisherOptical Society of America
ISBN (Print)1424411742, 9781424411740
Publication statusPublished - Jan 1 2007
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 26 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
CountryKorea, Republic of
CitySeoul
Period8/26/078/26/07

Fingerprint

laser induced fluorescence
Tin
plumes
Light sources
tin
light sources
Fluorescence
Laser produced plasmas
Imaging techniques
Lasers
Photolithography
debris
Debris
lasers
Sputtering
lithography
sputtering
Plasmas
Atoms
Ions

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Nakamura, D., Hashimoto, Y., Tamaru, K., Takahashi, A., & Okada, T. (2007). Laser-imaging of laser-produced tin plume behavior for EUV light source. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 (Optics InfoBase Conference Papers). Optical Society of America.

Laser-imaging of laser-produced tin plume behavior for EUV light source. / Nakamura, Daisuke; Hashimoto, Yuki; Tamaru, Koji; Takahashi, Akihiko; Okada, Tatsuo.

Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakamura, D, Hashimoto, Y, Tamaru, K, Takahashi, A & Okada, T 2007, Laser-imaging of laser-produced tin plume behavior for EUV light source. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007, Seoul, Korea, Republic of, 8/26/07.
Nakamura D, Hashimoto Y, Tamaru K, Takahashi A, Okada T. Laser-imaging of laser-produced tin plume behavior for EUV light source. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America. 2007. (Optics InfoBase Conference Papers).
Nakamura, Daisuke ; Hashimoto, Yuki ; Tamaru, Koji ; Takahashi, Akihiko ; Okada, Tatsuo. / Laser-imaging of laser-produced tin plume behavior for EUV light source. Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).
@inproceedings{c407b7ac1802455382740225c0f301db,
title = "Laser-imaging of laser-produced tin plume behavior for EUV light source",
abstract = "Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.",
author = "Daisuke Nakamura and Yuki Hashimoto and Koji Tamaru and Akihiko Takahashi and Tatsuo Okada",
year = "2007",
month = "1",
day = "1",
language = "English",
isbn = "1424411742",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007",

}

TY - GEN

T1 - Laser-imaging of laser-produced tin plume behavior for EUV light source

AU - Nakamura, Daisuke

AU - Hashimoto, Yuki

AU - Tamaru, Koji

AU - Takahashi, Akihiko

AU - Okada, Tatsuo

PY - 2007/1/1

Y1 - 2007/1/1

N2 - Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

AB - Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.

UR - http://www.scopus.com/inward/record.url?scp=84899047169&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84899047169&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84899047169

SN - 1424411742

SN - 9781424411740

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007

PB - Optical Society of America

ER -