Laser-induced damage of optical coatings grown with surface chemical reaction

Zaitsu Shin-Ichi, Shinji Motokoshi, Takahisa Jitsuno, Tatsuhiko Yamanaka

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be precisely controlled only by the number of cycles. Two-layer TiO2Al2O3 anti-reflection coating with less than 0.2% reflection loss at 532 nm was fabricated. Laser-induced damage thresholds strongly depended on the growth temperature and the introduced gas pressure. They increased with decreasing the growth temperature and with increasing the introduced gas pressure.

Original languageEnglish
Pages (from-to)204-211
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3492
Issue numberI
Publication statusPublished - 1999
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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