Laser power dependence of particulate formation on pulse laser deposited films

Yukio Watanabe, M. Tanamura, S. Matsumoto, Y. Seki

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The density and the size of particulates in films laser-deposited at room temperature using various target materials were observed to depend strongly on the target material and the laser power density. However, loose universal relations between the deposition rates and the particulate density as well as the particulate size were found, where the latter corresponds approximately to the ratio of the laser power density to the ablation threshold. Furthermore, particulates consisting of only some of the target elements such as CuOx were found. Additionally, an acceptably high deposition rate was obtained by using halide and sulfide targets. These materials offer a possibility of deposition using a low power laser.

Original languageEnglish
Pages (from-to)2029-2036
Number of pages8
JournalJournal of Applied Physics
Volume78
Issue number3
DOIs
Publication statusPublished - Dec 1 1995
Externally publishedYes

Fingerprint

particulates
pulses
lasers
radiant flux density
ablation
halides
sulfides
thresholds
room temperature

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Laser power dependence of particulate formation on pulse laser deposited films. / Watanabe, Yukio; Tanamura, M.; Matsumoto, S.; Seki, Y.

In: Journal of Applied Physics, Vol. 78, No. 3, 01.12.1995, p. 2029-2036.

Research output: Contribution to journalArticle

Watanabe, Yukio ; Tanamura, M. ; Matsumoto, S. ; Seki, Y. / Laser power dependence of particulate formation on pulse laser deposited films. In: Journal of Applied Physics. 1995 ; Vol. 78, No. 3. pp. 2029-2036.
@article{3ca5a4fbe34b4837a8e355e296826aa5,
title = "Laser power dependence of particulate formation on pulse laser deposited films",
abstract = "The density and the size of particulates in films laser-deposited at room temperature using various target materials were observed to depend strongly on the target material and the laser power density. However, loose universal relations between the deposition rates and the particulate density as well as the particulate size were found, where the latter corresponds approximately to the ratio of the laser power density to the ablation threshold. Furthermore, particulates consisting of only some of the target elements such as CuOx were found. Additionally, an acceptably high deposition rate was obtained by using halide and sulfide targets. These materials offer a possibility of deposition using a low power laser.",
author = "Yukio Watanabe and M. Tanamura and S. Matsumoto and Y. Seki",
year = "1995",
month = "12",
day = "1",
doi = "10.1063/1.360179",
language = "English",
volume = "78",
pages = "2029--2036",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "3",

}

TY - JOUR

T1 - Laser power dependence of particulate formation on pulse laser deposited films

AU - Watanabe, Yukio

AU - Tanamura, M.

AU - Matsumoto, S.

AU - Seki, Y.

PY - 1995/12/1

Y1 - 1995/12/1

N2 - The density and the size of particulates in films laser-deposited at room temperature using various target materials were observed to depend strongly on the target material and the laser power density. However, loose universal relations between the deposition rates and the particulate density as well as the particulate size were found, where the latter corresponds approximately to the ratio of the laser power density to the ablation threshold. Furthermore, particulates consisting of only some of the target elements such as CuOx were found. Additionally, an acceptably high deposition rate was obtained by using halide and sulfide targets. These materials offer a possibility of deposition using a low power laser.

AB - The density and the size of particulates in films laser-deposited at room temperature using various target materials were observed to depend strongly on the target material and the laser power density. However, loose universal relations between the deposition rates and the particulate density as well as the particulate size were found, where the latter corresponds approximately to the ratio of the laser power density to the ablation threshold. Furthermore, particulates consisting of only some of the target elements such as CuOx were found. Additionally, an acceptably high deposition rate was obtained by using halide and sulfide targets. These materials offer a possibility of deposition using a low power laser.

UR - http://www.scopus.com/inward/record.url?scp=0029358007&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029358007&partnerID=8YFLogxK

U2 - 10.1063/1.360179

DO - 10.1063/1.360179

M3 - Article

VL - 78

SP - 2029

EP - 2036

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 3

ER -