Laser stimulated scattering microscope: A tool for investigating modified metallic surfaces

Akira Harata; Hiroyuki Nishimura; Takayuki Tanaka; Tsuguo Sawada

doi:10.1063/1.1144186

Laser stimulated scattering microscope: A tool for investigating modified metallic surfaces

Akira Harata, Hiroyuki Nishimura, Takayuki Tanaka, Tsuguo Sawada

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

An instrument, based on the principle of microscopic measurements using transient reflecting gratings, has been built for investigation of modified metallic surfaces. After holographic illumination of focused light pulses of short duration, dynamic processes are observed by detecting the reflecting diffraction of the synchronously delayed probe pulse, while the sample is two-dimensionally scanned. Distribution imaging and relaxation time (or diffusivity) imaging are demonstrated for ion-implanted silicon wafers.

Original language	English
Pages (from-to)	618-622
Number of pages	5
Journal	Review of Scientific Instruments
Volume	64
Issue number	3
DOIs	https://doi.org/10.1063/1.1144186
Publication status	Published - Dec 1 1993
Externally published	Yes

All Science Journal Classification (ASJC) codes

Instrumentation

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10.1063/1.1144186

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abstract = "An instrument, based on the principle of microscopic measurements using transient reflecting gratings, has been built for investigation of modified metallic surfaces. After holographic illumination of focused light pulses of short duration, dynamic processes are observed by detecting the reflecting diffraction of the synchronously delayed probe pulse, while the sample is two-dimensionally scanned. Distribution imaging and relaxation time (or diffusivity) imaging are demonstrated for ion-implanted silicon wafers.",

author = "Akira Harata and Hiroyuki Nishimura and Takayuki Tanaka and Tsuguo Sawada",

year = "1993",

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Y1 - 1993/12/1

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Laser stimulated scattering microscope: A tool for investigating modified metallic surfaces

Abstract

All Science Journal Classification (ASJC) codes

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