Laser stimulated scattering microscope: A tool for investigating modified metallic surfaces

Akira Harata, Hiroyuki Nishimura, Takayuki Tanaka, Tsuguo Sawada

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

An instrument, based on the principle of microscopic measurements using transient reflecting gratings, has been built for investigation of modified metallic surfaces. After holographic illumination of focused light pulses of short duration, dynamic processes are observed by detecting the reflecting diffraction of the synchronously delayed probe pulse, while the sample is two-dimensionally scanned. Distribution imaging and relaxation time (or diffusivity) imaging are demonstrated for ion-implanted silicon wafers.

Original languageEnglish
Pages (from-to)618-622
Number of pages5
JournalReview of Scientific Instruments
Volume64
Issue number3
DOIs
Publication statusPublished - Dec 1 1993
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Instrumentation

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