Laser Thomson scattering diagnostics of non-equilibrium high pressure plasmas as applied to excimer laser pumping and plasma display

K. Muraoka, M. Maeda, K. Uchino, Y. Noguchi

Research output: Contribution to journalArticle

Abstract

Laser Thomson scattering method was applied to measure electron density and temperature of non-equilibrium high-pressure plasmas used for excimer laser pumping and plasma display panel. These quantities, with very high spatial and temporal resolutions and without plasma perturbation, were not obtainable by other means. The results so obtained were used to discuss the structure of the discharge.

Original languageEnglish
Pages (from-to)230-238
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4460
DOIs
Publication statusPublished - 2002

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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