Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment

Keisuke Nogami, Yasuhiro Sakai, Shota Mineta, Daiji Kato, Izumi Murakami, Hiroyuki A. Sakaue, Takahiro Kenmotsu, Kenji Furuya, Kenji Motohashi

Research output: Contribution to journalArticle

Abstract

Visible emission spectra were acquired from neutral atoms sputtered by 35-60 keV Kr+ ions from a polycrystalline tungsten surface. Mean velocities of excited tungsten atoms in seven different 6p states were also obtained via the dependence of photon intensities on the distance from the surface. The average velocities parallel to the surface normal varied by factors of 2-4 for atoms in the different 6p energy levels. However, they were almost independent of the incident ion kinetic energy. The 6p-level energy dependence indicated that the velocities of the excited atoms were determined by inelastic processes that involve resonant charge exchange.

Original languageEnglish
Article number061602
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume33
Issue number6
DOIs
Publication statusPublished - Nov 1 2015

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Krypton
Tungsten
krypton
Ion bombardment
Electron energy levels
bombardment
tungsten
energy levels
Atoms
atoms
ions
Ions
neutral atoms
visible spectrum
charge exchange
emission spectra
kinetic energy
Kinetic energy
Photons
photons

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment. / Nogami, Keisuke; Sakai, Yasuhiro; Mineta, Shota; Kato, Daiji; Murakami, Izumi; Sakaue, Hiroyuki A.; Kenmotsu, Takahiro; Furuya, Kenji; Motohashi, Kenji.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 33, No. 6, 061602, 01.11.2015.

Research output: Contribution to journalArticle

Nogami, Keisuke ; Sakai, Yasuhiro ; Mineta, Shota ; Kato, Daiji ; Murakami, Izumi ; Sakaue, Hiroyuki A. ; Kenmotsu, Takahiro ; Furuya, Kenji ; Motohashi, Kenji. / Level-energy-dependent mean velocities of excited tungsten atoms sputtered by krypton-ion bombardment. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2015 ; Vol. 33, No. 6.
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