Liquid injection ALD of Pb (Zr,Ti) Ox thin films by a combination of self-regulating component oxide processes

Takayuki Watanabe, Susanne Hoffmann-Eifert, Frank Peter, Shaobo Mi, Chunlin Jia, Cheol Seong Hwang, Rainer Waser

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science