Liquid injection ALD of Pb (Zr,Ti) Ox thin films by a combination of self-regulating component oxide processes

Takayuki Watanabe, Susanne Hoffmann-Eifert, Frank Peter, Shaobo Mi, Chunlin Jia, Cheol Seong Hwang, Rainer Waser

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Liquid injection ALD of Pb (Zr,Ti) O<sub>x</sub> thin films by a combination of self-regulating component oxide processes'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds