Liquid injection atomic layer deposition of perovskite-type multi-component oxide thin films for ferroelectric and higher-k three dimensional capacitor structures

Susanne Hoffmann-Eifert, Takayuki Watanabe, Cheol Seong Hwang, Rainer Waser

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Quaternary Pb(Zr,Ti)Ox [PZT] films were deposited at 240°C by a combination of liquid injection atomic layer depositions (ALD) of binary PbO, TiOx, and ZrOx thin films. To find the optimum set of precursors different combinations of five precursors were tested: Pb(C 11H19O2)2 [Pb(DPM)2], Ti(OC3H7)2(C11H19O 2)2 [Ti(Oi-Pr)2(DPM)2] or Ti(OC 3H7)4 [Ti(Oi-Pr)4], and Zr(C 11H19O2)4 [Zr(DPM)4] or Zr(C9H15O2)4 [Zr(DIBM)4]. Each precursor was dissolved in ethylcyclohexane (ECH) and was separately injected into a vaporizer. Water vapor was used as oxidant. The deposition rates of the metal elements were investigated as a function of the input of the solutions. Using the set of 0.1M Pb(DPM)2, Ti(Oi-Pr)4, and Zr(DIBM)4 solutions resulted in PZT films with good uniformity on 3D structured substrates. The Zr to Ti ratio in the as-deposited PZT films could be adjusted in the range up to Zr/Ti =1. This study suggests that the multi-layer stacking liquid delivery ALD process is an effective method for building up homogeneous layers of multi-component materials on desired 3D structures.

Original languageEnglish
Title of host publication17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
DOIs
Publication statusPublished - Dec 1 2008
Externally publishedYes
Event17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 - Santa Fe, NM, United States
Duration: Feb 23 2008Feb 28 2008

Publication series

NameIEEE International Symposium on Applications of Ferroelectrics
Volume2

Other

Other17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
CountryUnited States
CitySanta Fe, NM
Period2/23/082/28/08

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Liquid injection atomic layer deposition of perovskite-type multi-component oxide thin films for ferroelectric and higher-k three dimensional capacitor structures'. Together they form a unique fingerprint.

Cite this