Long-life micro-laser encoder

Renshi Sawada, Eiji Higurashi, Osamu Ohguchi, Yoshito Jin

Research output: Contribution to conferencePaper

12 Citations (Scopus)

Abstract

We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

Original languageEnglish
Pages491-495
Number of pages5
Publication statusPublished - Jan 1 2000
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: Jan 23 2000Jan 27 2000

Conference

Conference13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period1/23/001/27/00

Fingerprint

Optical waveguides
Photodiodes
Polyimides
Semiconductor lasers
Silicon
Wavelength
Networks (circuits)
Lasers
Sensors

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Sawada, R., Higurashi, E., Ohguchi, O., & Jin, Y. (2000). Long-life micro-laser encoder. 491-495. Paper presented at 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, .

Long-life micro-laser encoder. / Sawada, Renshi; Higurashi, Eiji; Ohguchi, Osamu; Jin, Yoshito.

2000. 491-495 Paper presented at 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, .

Research output: Contribution to conferencePaper

Sawada, R, Higurashi, E, Ohguchi, O & Jin, Y 2000, 'Long-life micro-laser encoder', Paper presented at 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, 1/23/00 - 1/27/00 pp. 491-495.
Sawada R, Higurashi E, Ohguchi O, Jin Y. Long-life micro-laser encoder. 2000. Paper presented at 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, .
Sawada, Renshi ; Higurashi, Eiji ; Ohguchi, Osamu ; Jin, Yoshito. / Long-life micro-laser encoder. Paper presented at 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, .5 p.
@conference{5ad2c88c1f9447d698ffc893f69e8cb8,
title = "Long-life micro-laser encoder",
abstract = "We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.",
author = "Renshi Sawada and Eiji Higurashi and Osamu Ohguchi and Yoshito Jin",
year = "2000",
month = "1",
day = "1",
language = "English",
pages = "491--495",
note = "13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) ; Conference date: 23-01-2000 Through 27-01-2000",

}

TY - CONF

T1 - Long-life micro-laser encoder

AU - Sawada, Renshi

AU - Higurashi, Eiji

AU - Ohguchi, Osamu

AU - Jin, Yoshito

PY - 2000/1/1

Y1 - 2000/1/1

N2 - We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

AB - We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

UR - http://www.scopus.com/inward/record.url?scp=0033724452&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033724452&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0033724452

SP - 491

EP - 495

ER -