Long-life micro-laser encoder

Renshi Sawada, Eiji Higurashi, Osamu Ohguchi, Yoshito Jin

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

Original languageEnglish
Pages (from-to)491-495
Number of pages5
JournalProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - Jan 1 2000
Externally publishedYes

Fingerprint

Optical waveguides
Photodiodes
Polyimides
Semiconductor lasers
Silicon
Wavelength
Networks (circuits)
Lasers
Sensors

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Sawada, R., Higurashi, E., Ohguchi, O., & Jin, Y. (2000). Long-life micro-laser encoder. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 491-495.

Long-life micro-laser encoder. / Sawada, Renshi; Higurashi, Eiji; Ohguchi, Osamu; Jin, Yoshito.

In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 01.01.2000, p. 491-495.

Research output: Contribution to journalArticle

Sawada, R, Higurashi, E, Ohguchi, O & Jin, Y 2000, 'Long-life micro-laser encoder', Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), pp. 491-495.
Sawada R, Higurashi E, Ohguchi O, Jin Y. Long-life micro-laser encoder. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2000 Jan 1;491-495.
Sawada, Renshi ; Higurashi, Eiji ; Ohguchi, Osamu ; Jin, Yoshito. / Long-life micro-laser encoder. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2000 ; pp. 491-495.
@article{5ad2c88c1f9447d698ffc893f69e8cb8,
title = "Long-life micro-laser encoder",
abstract = "We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.",
author = "Renshi Sawada and Eiji Higurashi and Osamu Ohguchi and Yoshito Jin",
year = "2000",
month = "1",
day = "1",
language = "English",
pages = "491--495",
journal = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

}

TY - JOUR

T1 - Long-life micro-laser encoder

AU - Sawada, Renshi

AU - Higurashi, Eiji

AU - Ohguchi, Osamu

AU - Jin, Yoshito

PY - 2000/1/1

Y1 - 2000/1/1

N2 - We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

AB - We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

UR - http://www.scopus.com/inward/record.url?scp=0033724452&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033724452&partnerID=8YFLogxK

M3 - Article

SP - 491

EP - 495

JO - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

ER -