Long-life micro-laser encoder

Renshi Sawada, Eiji Higurashi, Osamu Ohguchi, Yoshito Jin

    Research output: Contribution to conferencePaperpeer-review

    12 Citations (Scopus)

    Abstract

    We have developed a micro-laser encoder that can detect displacements relative to an external grating scale with resolution on the order of 10 nm. Its size is only a few percent of a conventional encoder's size. A long-lasting InP laser diode with a wavelength of 1550 nm is bonded, along with several photodiode chips, within an alignment accuracy of ±1 μm onto a silicon planar lightwave circuit chip. The chip is 2.3 mm×1.7 mm and includes a fluorinated polyimide light waveguide fabricated in advance. A wide gap of more than 600 μm was obtained between the external grating scale and the encoder despite the tiny size of the sensor. When used as a rotary encoder, the number of rotations could also be detected. Thus. this microencoder satisfies the market requirements for practical use.

    Original languageEnglish
    Pages491-495
    Number of pages5
    Publication statusPublished - Jan 1 2000
    Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
    Duration: Jan 23 2000Jan 27 2000

    Conference

    Conference13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
    CityMiyazaki, Jpn
    Period1/23/001/27/00

    All Science Journal Classification (ASJC) codes

    • Control and Systems Engineering
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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