Loss kinetics of carbon atoms in low-pressure high density plasmas

Haruhiko Ito, Kungen Teii, Hikaru Funakoshi, Masaru Hori, Toshio Goto, Masafumi Ito, Takashi Takeo

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12 Citations (Scopus)

Abstract

Vacuum ultraviolet absorption spectroscopy (VUVAS) with a carbon hollow cathode lamp was applied to the measurement of decay rate of C atom density in the afterglow of CO and CO/H2 inductively coupled plasmas. The transition line used for the measurement was 2p3s3 P2-2p23P2 at 165.7 nm. The influence of background absorption by the species in plasma other than C atoms on the transition line of C atoms was found to be negligible. This was clarified by measuring the absorption intensities around the center wavelength of C atoms in plasmas with VUVAS employing a xenon microhollow cathode lamp. Moreover, the dependence of the decay rate of C atom density on pressure revealed that C atoms were dominantly lost at the surface rather than in the gas phase in both CO and CO/H2 plasmas. However, in the case of CO/H2 plasma at higher pressures over about 5.0 Pa, C atoms were lost in the gas phase as well as at the surface. The diffusion constants of C atoms in both CO and CO/H2 plasmas were also determined to be 3.1×104 and 3.7 × 104 cm2 Pas-1, respectively.

Original languageEnglish
Pages (from-to)4537-4541
Number of pages5
JournalJournal of Applied Physics
Volume88
Issue number8
DOIs
Publication statusPublished - Oct 2000
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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