Low-damage plasma processing of polymers for development of organic-inorganic flexible devices

Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Plasma generation and control technologies for processing of polymers have been developed with multiple low-inductance antenna (LIA) units, as a promising candidate for next-generation processing of hybrid flexible devices. Properties of argon-oxygen mixture plasmas sustained with multiple LIA units have been investigated in terms of ion energies bombarding onto polymer surface. Ion energy distribution at the sheath edge of the argon-oxygen mixture plasmas showed considerable suppression of ion energies as small as or less than 10 eV. Effects of the plasma exposure onto polymers have been examined using hard x-ray photoelectron spectroscopy (HXPES) in terms of chemical bonding states of the polymer surface and the interface between polymer and silicon film.

Original languageEnglish
JournalSurface and Coatings Technology
Volume205
Issue numberSUPPL. 1
DOIs
Publication statusPublished - Dec 25 2010

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Low-damage plasma processing of polymers for development of organic-inorganic flexible devices'. Together they form a unique fingerprint.

  • Cite this