TY - JOUR
T1 - Low-Power and ppm-Level Multimolecule Detection by Integration of Self-Heated Metal Nanosheet Sensors
AU - Tanaka, Takahisa
AU - Yanagida, Takeshi
AU - Uchida, Ken
AU - Tabuchi, Kenta
AU - Tatehora, Kohei
AU - Shiiki, Yohsuke
AU - Nakagawa, Shuya
AU - Takahashi, Tsunaki
AU - Shimizu, Ryota
AU - Ishikuro, Hiroki
AU - Kuroda, Tadahiro
N1 - Funding Information:
Manuscript received July 1, 2019; revised September 4, 2019; accepted October 3, 2019. Date of publication October 30, 2019; date of current version November 27, 2019. This work was supported in part by the JST CREST under Grant JPMJCR1331 and in part by the JSPS KAKENHI under Grant 19H00756. This article was originally presented in the 2019 Symposium on VLSI Technology, Kyoto, Japan. The review of this article was arranged by Editor E. Pop. (Corresponding author: Takahisa Tanaka.) T. Tanaka and K. Uchida are with the Department of Materials Engineering, University of Tokyo, Hongo 113-8656, Japan (e-mail: tanaka@ssn.t.u-tokyo.ac.jp; uchidak@material.t.u-tokyo.ac.jp).
Funding Information:
This work was supported in part by the JST CREST under Grant JPMJCR1331 and in part by the JSPS KAKENHI under Grant 19H00756.
Publisher Copyright:
© 1963-2012 IEEE.
PY - 2019/12
Y1 - 2019/12
N2 - H2 and NH3 detection with low power consumption was demonstrated by integrated chemiresistive Pt and PtRh nanosheet sensors on glass substrates. The self-heating effects realized low power and local heating of metal nanosheet sensors, enabling the integration of sensors with different operating temperatures. Based on different resistance changes in Pt and PtRh nanosheets toward H2 and NH3, the concentration of each gas was detected from a gas mixture by consuming around 1-mW power. For decreasing the power consumption and further integration of sensors, sensor scaling and pulsed operations were numerically and experimentally studied. In addition to good connectivity of metal nanosheet sensors to large-scale integration (LSI) circuits, improvements of the power consumption by sensor scaling were proven. The pulsed operations required for integrated sensor arrays maintained a sensor response, or a resistance change, of approximately 60%, even when the power consumption was reduced by 20%.
AB - H2 and NH3 detection with low power consumption was demonstrated by integrated chemiresistive Pt and PtRh nanosheet sensors on glass substrates. The self-heating effects realized low power and local heating of metal nanosheet sensors, enabling the integration of sensors with different operating temperatures. Based on different resistance changes in Pt and PtRh nanosheets toward H2 and NH3, the concentration of each gas was detected from a gas mixture by consuming around 1-mW power. For decreasing the power consumption and further integration of sensors, sensor scaling and pulsed operations were numerically and experimentally studied. In addition to good connectivity of metal nanosheet sensors to large-scale integration (LSI) circuits, improvements of the power consumption by sensor scaling were proven. The pulsed operations required for integrated sensor arrays maintained a sensor response, or a resistance change, of approximately 60%, even when the power consumption was reduced by 20%.
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U2 - 10.1109/TED.2019.2945932
DO - 10.1109/TED.2019.2945932
M3 - Article
AN - SCOPUS:85076087377
SN - 0018-9383
VL - 66
SP - 5393
EP - 5398
JO - IEEE Transactions on Electron Devices
JF - IEEE Transactions on Electron Devices
IS - 12
M1 - 8887245
ER -