Low temperature and high rate deposition of ferrite thin films by reactive sputtering method using electron cyclotron resonance

Terumitsu Tanaka, Kazunori Oshiro, Hirotaka Fujimori, Hiroki Kurisu, Yoshihiro Shimosato, Shigenobu Okada, Mitsuru Matsuura, Setsuo Yamamoto

Research output: Contribution to journalArticle

Fingerprint Dive into the research topics of 'Low temperature and high rate deposition of ferrite thin films by reactive sputtering method using electron cyclotron resonance'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy